Ultralow-loss tightly confining Si 3 N 4 waveguides and high-Q microresonators

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Authors: Houssein El Dirani, Laurene Youssef, Camille Petit-Etienne, Sebastien Kerdiles, Philippe Grosse, Christelle Monat, Erwine Pargon, Corrado Sciancalepore

Journal title: Optics Express

Journal number: 27/21

Journal publisher: Optical Society of America

Published year: 2019

Published pages: 30726

DOI identifier: 10.1364/oe.27.030726

ISSN: 1094-4087