High- Q Silicon Nitride Drum Resonators Strongly Coupled to Gates.

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Authors: Xin Zhou; Srisaran Venkatachalam; Ronghua Zhou; Hao Xu; Alok Pokharel; Andrew Fefferman; Mohammed Zaknoune; Eddy Collin

Journal title: Nano Letters

Journal number: 21

Journal publisher: American Chemical Society

Published year: 2021

Published pages: 5738–5744

DOI identifier: 10.1021/acs.nanolett.1c01477

ISSN: 1530-6984