Extremely high-aspect-ratio ultrafast Bessel beam generation and stealth dicing of multi-millimeter thick glass

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Authors: R. Meyer, L. Froehly, R. Giust, J. Del Hoyo, L. Furfaro, C. Billet, F. Courvoisier

Journal title: Applied Physics Letters

Journal number: 114/20

Journal publisher: American Institute of Physics

Published year: 2019

Published pages: 201105

DOI identifier: 10.1063/1.5096868

ISSN: 0003-6951