In-volume structuring of silicon using picosecond laser pulses

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Authors: H. Kämmer, G. Matthäus, S. Nolte, M. Chanal, O. Utéza, D. Grojo

Journal title: Applied Physics A

Journal number: 124/4

Journal publisher: Springer Verlag

Published year: 2018

DOI identifier: 10.1007/s00339-018-1715-1

ISSN: 0947-8396