Inscribing diffraction gratings in bulk silicon with nanosecond laser pulses

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Authors: M. Chambonneau, D. Richter, S. Nolte, D. Grojo

Journal title: Optics Letters

Journal number: 43/24

Journal publisher: Optical Society of America

Published year: 2018

Published pages: 6069

DOI identifier: 10.1364/OL.43.006069

ISSN: 0146-9592