Positive- and negative-tone structuring of crystalline silicon by laser-assisted chemical etching

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Authors: M. Chambonneau, X. Wang, X. Yu, Q. Li, D. Chaudanson, S. Lei, D. Grojo

Journal title: Optics Letters

Journal number: 44/7

Journal publisher: Optical Society of America

Published year: 2019

Published pages: 1619

DOI identifier: 10.1364/OL.44.001619

ISSN: 0146-9592