Three-dimensional luminescence microscopy for quantitative plasma characterization in bulk semiconductors

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Authors: A. Wang, A. Das, J. Hermann, D. Grojo

Journal title: Applied Physics Letters

Journal number: 119/4

Journal publisher: American Institute of Physics

Published year: 2021

Published pages: 041108

DOI identifier: 10.1063/5.0059431

ISSN: 0003-6951