Development of TiN Vacuum-Gap Capacitor Lumped-Element Kinetic Inductance Detectors

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Authors: Boussaha, Faouzi ; Beldi, Samir ; Monfardini, Alessandro ; Hu, Jie ; Calvo, Martino ; Chaumont, Christine ; Levy-Bertrand, Florence ; Vacelet, Thibaut ; Traini, Alessandro ; Firminy, Josiane ; Piat, Michel ; Reix, Florent

Journal title: Journal of Low Temperature Physics,

Journal number: vol. 199, issue 3-4

Journal publisher: Kluwer Academic/Plenum Publishers

Published year: 2020

Published pages: 994-1003

DOI identifier: 10.1007/s10909-019-02309-0

ISSN: 0022-2291