Resonant micro-opto-mechanical modulators fabricated by femtosecond laser micromachining

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Authors: Michele Spagnolo, Roberto Memeo, Riccardo Motta, Francesco Pellegatta, Andrea Crespi, Roberto Osellame

Journal title: Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XX

Journal number: Volume 11270

Journal publisher: SPIE

Published year: 2020

Published pages: 45

DOI identifier: 10.1117/12.2544354

ISBN: 9781-510633049