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Authors: Alessandro Rizzo, Enrico Domenico Lemma, Filippo Pisano, Marco Pisanello, Leonardo Sileo, Massimo De Vittorio, Ferruccio Pisanello
Journal title: Microelectronic Engineering
Journal number: 192
Journal publisher: Elsevier BV
Published year: 2018
Published pages: 88-95
DOI identifier: 10.1016/j.mee.2018.02.010
ISSN: 0167-9317