Focused ion beam nanomachining of tapered optical fibers for patterned light delivery

Summary

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Authors: Filippo Pisano, Marco Pisanello, Leonardo Sileo, Antonio Qualtieri, Bernardo L. Sabatini, Massimo De Vittorio, Ferruccio Pisanello

Journal title: Microelectronic Engineering

Journal number: 195

Journal publisher: Elsevier BV

Published year: 2018

Published pages: 41-49

DOI identifier: 10.1016/j.mee.2018.03.023

ISSN: 0167-9317