Hybrid multi-chip assembly of optical communication engines by in situ 3D nano-lithography

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Authors: Matthias Blaicher, Muhammad Rodlin Billah, Juned Kemal, Tobias Hoose, Pablo Marin-Palomo, Andreas Hofmann, Yasar Kutuvantavida, Clemens Kieninger, Philipp-Immanuel Dietrich, Matthias Lauermann, Stefan Wolf, Ute Troppenz, Martin Moehrle, Florian Merget, Sebastian Skacel, Jeremy Witzens, Sebastian Randel, Wolfgang Freude, Christian Koos

Journal title: Light: Science & Applications

Journal number: 9/1

Journal publisher: Nature

Published year: 2020

DOI identifier: 10.1038/s41377-020-0272-5

ISSN: 2047-7538