Design, Development and Validation of a Micro-Pirani pressure sensor for micro and macro scale applications

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Authors: S. Toto, G. L. Morini, J., J. J. Brandner

Journal title: Proceedings of the 1st MIGRATE international workshop

Journal number: June 30 - July 1st, 2016

Journal publisher: 1st MIGRATE international workshop

Published year: 2016