Process Variability for Devices at and beyond the 7 nm Node

Summary

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Authors: J. K. Lorenz, A. Asenov, E. Baer, S. Barraud, F. Kluepfel, C. Millar, M. Nedjalkov

Journal title: ECS Journal of Solid State Science and Technology

Journal number: 7/11

Journal publisher: Electrochemical Society, Inc.

Published year: 2018

Published pages: P595-P601

DOI identifier: 10.1149/2.0051811jss

ISSN: 2162-8769