SAW-Pirani vacuum sensor with extended range and sensitivity

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Authors: Sofia TOTO; Pascal NICOLAY; Gian Luca MORINI; Michael RAPP; Jan G. KORVINK; Juergen J. BRANDNER

Journal title: Proceedings of 6th Micro and Nano Flows Conference (MNF18)

Journal number: 2

Journal publisher: 6th Micro and Nano Flows Conference

Published year: 2018