Design of a SAW Pirani sensor with extended range and sensitivity

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Authors: S. Toto, P. Nicolay, G.L. Morini, J. Brandner

Journal title: 5th European Conference on Microfluidics and 3rd European Conference on Non-equilibrium Gas Flows

Journal number: 2

Journal publisher: 3rd European Conference on Non-equilibrium Gas Flows

Published year: 2018