(Invited) Process Variability for Devices at and Beyond the 7 nm Node

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Authors: Juergen Klaus Lorenz, Asen Asenov, Eberhard Baer, Sylvain Barraud, Campbell Millar, Mihail Nedjalkov

Journal title: ECS Transactions

Journal number: 85/8

Journal publisher: Electrochemical Society, Inc.

Published year: 2018

Published pages: 113-124

DOI identifier: 10.1149/08508.0113ecst

ISSN: 1938-5862