CHARACTERIZATION OF A WIRELESS VACUUM SENSOR PROTOTYPE BASED ON THE SAW PIRANI PRINCIPLE

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Authors: Sofia Toto, Juergen Brandner, Jan Korvink, Achim Voigt, Suparna Sundarayyan

Journal title: Proceedings of the International Symposium on Thermal Effects in Gas flows In Microscale ISTEGIM 2019

Journal number: October 24-25, 2019

Journal publisher: International Symposium on Thermal Effects in Gas flows In Microscale ISTEGIM 2019

Published year: 2019