Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review

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Authors: Xaver Klemenschits, Siegfried Selberherr, Lado Filipovic

Journal title: Micromachines

Journal number: 9/12

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2018

Published pages: 631

DOI identifier: 10.3390/mi9120631

ISSN: 2072-666X