Process Variability—Technological Challenge and Design Issue for Nanoscale Devices

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Authors: Jürgen Lorenz, Eberhard Bär, Sylvain Barraud, Andrew Brown, Peter Evanschitzky, Fabian Klüpfel, Liping Wang

Journal title: Micromachines

Journal number: 10/1

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2019

Published pages: 6

DOI identifier: 10.3390/mi10010006

ISSN: 2072-666X