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Authors: Kadi L. Saar, Quentin Peter, Thomas Müller, Pavan K. Challa, Therese W. Herling, Tuomas P. J. Knowles
Journal title: Microsystems & Nanoengineering
Journal number: 5/1
Journal publisher: Springer Nature
Published year: 2019
Published pages: s41378
DOI identifier: 10.1038/s41378-019-0072-3
ISSN: 2055-7434