Annealing induced cation diffusion in TaO x -based memristor and its compatibility for back-end-of-line post-processing

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Authors: Prasad, Om Kumar Chandrasekaran, Sridhar Chung, Chin-han Chang, Kow-ming Simanjuntak, Firman Mangasa

Journal title: Applied Physics Letters

Journal publisher: American Institute of Physics

Published year: 2022

DOI identifier: 10.1063/5.0123583

ISSN: 0003-6951