Anomaly Detection in Float-Zone Crystal Growth of Silicon

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Authors: TingtingChen, GuidoTosello, NicoWerner, MatteoCalaon

Journal title: Procedia CIRP

Journal number: 22128271

Journal publisher: Elsevier

Published year: 2022

DOI identifier: 10.1016/j.procir.2022.05.184

ISSN: 2212-8271