Photoacoustic cell on silicon for mid-infrared QCL-based spectroscopic analysis

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Authors: Jean-Guillaume Coutard, Alain Glière, Jean-Marc Fédéli, Olivier Lartigue, Jules Skubich, Guillaume Aoust, Alexandre Teulle, Thomas Strahl, Sergio Nicoletti, Mathieu Carras, Laurent Duraffourg

Journal title: MOEMS and Miniaturized Systems XVIII

Journal publisher: SPIE

Published year: 2019

Published pages: 30

DOI identifier: 10.1117/12.2506514

ISBN: 9781-510625051