Volume Fabrication of Quantum Cascade Lasers on 200 mm-CMOS pilot line

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Authors: J. G Coutard, M. Brun, M. Fournier, O. Lartigue, F. Fedeli, G. Maisons, J. M Fedeli, S. Nicoletti, M. Carras, L. Duraffourg

Journal title: Scientific Reports

Journal number: 10/1

Journal publisher: Nature Publishing Group

Published year: 2020

Published pages: 6185

DOI identifier: 10.1038/s41598-020-63106-4

ISSN: 2045-2322