(Invited) 3D Monolithic Integration

Summary

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Authors: Laurent Brunet, Perrine Batude, Claire Fenouillet-Beranger, Maud Vinet

Journal title: ECS Transactions

Journal number: 85/8

Journal publisher: Electrochemical Society, Inc.

Published year: 2018

Published pages: 125-130

DOI identifier: 10.1149/08508.0125ecst

ISSN: 1938-5862