Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators

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Authors: Christoph Hohle, Sebastian Döring, Martin Friedrichs, Andreas Gehner, Dirk Rudloff, Matthias Schulze, Ronald Stübner, Daniela Trenkler

Journal publisher: SPIE Opto 2021

Published year: 2021

DOI identifier: 10.1117/12.2583036