Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures

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Authors: Robert Wenisch, Frank Lungwitz, Daniel Hanf, René Heller, Jens Zscharschuch, René Hübner, Johannes von Borany, Gintautas Abrasonis, Sibylle Gemming, Ramon Escobar-Galindo, Matthias Krause

Journal title: Analytical Chemistry

Journal number: 90/13

Journal publisher: American Chemical Society

Published year: 2018

Published pages: 7837-7842

DOI identifier: 10.1021/acs.analchem.8b00923

ISSN: 0003-2700