Room temperature deposition of highly dense TiO 2 thin films by filtered cathodic vacuum arc

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Authors: E. Guillén, I. Heras, G. Rincón Llorente, F. Lungwitz, M. Alcon-Camas, R. Escobar-Galindo

Journal title: Nanostructured Thin Films VIII

Journal publisher: SPIE

Published year: 2015

Published pages: 95580S

DOI identifier: 10.1117/12.2189503