Comprehensive microstructural and optical characterization of the thermal stability of aluminum-titanium oxynitride thin films after high temperature annealing in air

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Authors: R. Escobar-Galindo, I. Heras, E. Guillén, F. Munnik, I. Azkona, M. Krause

Journal title: Emergent Materials

Journal publisher: Springer Nature

Published year: 2021

DOI identifier: 10.1007/s42247-021-00298-z

ISSN: 2522-5731