About the importance of purge time in molecular layer deposition of alucone films

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Hardik Jain; Paul Poodt

Journal title: Dalton Transactions

Journal number: 13

Journal publisher: Royal Society of Chemistry

Published year: 2021

DOI identifier: 10.1039/d1dt00623a

ISSN: 1477-9226