Molecular Layer Deposition of Thermally Stable Polybenzimidazole-Like Thin Films and Nanostructures

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Authors: Saba Ghafourisaleh,Timo Hatanpää,Anton Vihervaara,Kenichiro Mizohata,Marko Vehkamäki,Markku Leskelä,Matti Putkonen,Mikko Ritala

Journal title: Advanced Materials Interfaces

Journal publisher: Wiley-VCH GmbH

Published year: 2022

DOI identifier: 10.1002/admi.202200370

ISSN: 2196-7350