Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films.

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Authors: Kristina Ashurbekova; Karina Ashurbekova; Iva Šarić; Evgeny Modin; Mladen Petravic; Ilmutdin M. Abdulagatov; A. I. Abdulagatov; Mato Knez; Mato Knez

Journal title: Chemical Communications

Journal number: 13597345

Journal publisher: Royal Society of Chemistry

Published year: 2021

DOI identifier: 10.1039/d0cc07858a

ISSN: 1359-7345