Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

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Authors: Xinzhi Li; Marko Vehkamäki; Mikko Heikkilä; Miika Mattinen; Matti Putkonen; Markku Leskelä; Mikko Ritala

Journal title: Coatings, 11(3):355. Multidisciplinary Digital Publishing Institute (MDPI)

Journal number: 7

Journal publisher: MDPI

Published year: 2021

DOI identifier: 10.3390/coatings11030355

ISSN: 2079-6412