Atomic/molecular layer deposition of cerium(iii) hybrid thin films using rigid organic precursors

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Authors: Parmish Kaur, Arbresha Muriqi, Jan-Lucas Wree, Ramin Ghiyasi, Muhammad Safdar, Michael Nolan, Maarit Karppinen and Anjana Devi

Journal title: Dalton Transactions

Journal publisher: The Royal Society of Chemistry

Published year: 2022

DOI identifier: 10.1039/d2dt00353h

ISSN: 1477-9234