Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification

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Authors: Juan Santo Domingo Penaranda; Mikko Nisula; Sofie S. T. Vandenbroucke; Sofie S. T. Vandenbroucke; Matthias Minjauw; Jin Li; Andreas Werbrouck; Jonas Keukelier; Jonas Keukelier; Andrea I Pitillas Martínez; Andrea I Pitillas Martínez; Jolien Dendooven; Christophe Detavernier

Journal title: Dalton Transactions

Journal number: 19

Journal publisher: Royal Society of Chemistry

Published year: 2021

DOI identifier: 10.1039/d0dt03896b

ISSN: 1477-9234