Spatial atmospheric pressure molecular layer deposition of alucone films using dimethylaluminum isopropoxide as the precursor

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Authors: H. Jain, M. Creatore, P. Poodt

Journal title: Dalton Transactions

Journal publisher: Royal Society of Chemistry

Published year: 2022

DOI identifier: 10.1039/d2dt00570k

ISSN: 1477-9226