Ultra-smooth and hydrophobic nitrogen-incorporated ultranano-crystalline diamond film growth in C-H-O-N gas phase system via microwave plasma CVD

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Authors: Yuting Zheng, Jinlong Liu, Junjun Wei, Liangxian Chen, Zhengcheng Li, Hui Hao, Fangsen Li, Haitao Ye, Chengming Li

Journal title: Surface and Coatings Technology

Journal number: 374

Journal publisher: Elsevier BV

Published year: 2019

Published pages: 409-417

DOI identifier: 10.1016/j.surfcoat.2019.06.017

ISSN: 0257-8972