Fast smoothing on diamond surface by inductively coupled plasma reactive ion etching

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Authors: Yuting Zheng, Jinlong Liu, Ruoying Zhang, Aude Cumont, Jue Wang, Junjun Wei, Chengming Li, Haitao Ye

Journal title: Journal of Materials Research

Journal number: 35/5

Journal publisher: Materials Research Society

Published year: 2020

Published pages: 462-472

DOI identifier: 10.1557/jmr.2019.369

ISSN: 0884-2914