Surface conductivity enhancement of H-terminated diamond based on the purified epitaxial diamond layer

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Authors: J. L. Liu, Y. T. Zheng, L. Z. Lin, Y. Zhao, L. X. Chen, J. J. Wei, J. J. Wang, J. C. Guo, Z. H. Feng, C. M. Li

Journal title: Journal of Materials Science

Journal number: 53/18

Journal publisher: Kluwer Academic Publishers

Published year: 2018

Published pages: 13030-13041

DOI identifier: 10.1007/s10853-018-2579-7

ISSN: 0022-2461