Surface morphology evolution of a polycrystalline diamond by inductively coupled plasma reactive ion etching (ICP-RIE)

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Authors: Yuting Zheng, Haitao Ye, Jinlong Liu, Junjun Wei, Liangxian Chen, Chengming Li

Journal title: Materials Letters

Journal number: 253

Journal publisher: Elsevier BV

Published year: 2019

Published pages: 276-280

DOI identifier: 10.1016/j.matlet.2019.06.079

ISSN: 0167-577X