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Authors: D. Esseni, R. Fontanini, D. Lizzit, M. Massarotto, F. Driussi, M. Loghi
Journal title: 2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
Journal publisher: IEEE
Published year: 2021
Published pages: 1-3
DOI identifier: 10.1109/edtm50988.2021.9420848
ISBN: 978-1-7281-8176-9
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