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Authors: R. Fontanini, M. Massarotto, R. Specogna, F. Driussi, M. Loghi, D. Esseni
Journal title: 2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
Journal publisher: IEEE
Published year: 2021
Published pages: 1-3
DOI identifier: 10.1109/edtm50988.2021.9420863
ISBN: 978-1-7281-8176-9
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