Deposition Parameter Effects on Niobium Nitride (NbN) Thin Films Deposited Onto Copper Substrates with DC Magnetron Sputtering

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Authors: Leith, Stewart; Jiang, Xin; Ries, Ratislav; Seiler, Eugen; Vogel, Michael

Journal title: SRF 2019 - Proceedings/ 19th Int. Conf. on RF Superconductivity

Journal number: 5

Journal publisher: JACoW Publishing

Published year: 2019

Published pages: 945 to 949

DOI identifier: 10.18429/jacow-srf2019-thp043

ISBN: 978-3-95450-211-0