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Authors: Bettina Heise, Guenther Hannesschlaeger, Elisabeth Leiss-Holzinger, Laura Peham, Ivan Zorin
Journal title: Optics and Photonics for Advanced Dimensional Metrology
Journal publisher: SPIE
Published year: 2020
Published pages: 37
DOI identifier: 10.1117/12.2556832
ISBN: 9781-510634770
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