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Authors: Weijin Guo, Linnea Gustafsson, Ronnie Jansson, My Hedhammar, Wouter van der Wijngaart
Journal title: 2018 IEEE Micro Electro Mechanical Systems (MEMS)
Journal publisher: IEEE
Published year: 2018
Published pages: 83-85
DOI identifier: 10.1109/memsys.2018.8346488
ISBN: 978-1-5386-4782-0