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Authors: Emre Iseri, Kerem Kaya, Giacomo di Dio, Hiroki Yasuga, Norihisa Miki, Wouter van der Wijngaart
Journal title: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
Journal publisher: IEEE
Published year: 2019
Published pages: 290-291
DOI identifier: 10.1109/memsys.2019.8870801
ISBN: 978-1-7281-1610-5
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