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Authors: Hiroki Yasuga, Toshihisa Osaki, Koki Kamiya, Emre Iseri, Wouter van der Wijngaart, Shoji Takeuchi, Norihisa Miki
Journal title: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
Journal publisher: IEEE
Published year: 2019
Published pages: 388-389
DOI identifier: 10.1109/memsys.2019.8870863
ISBN: 978-1-7281-1610-5