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Authors: Shashank Vasudevan; Janko Kajtez; Arto Heiskanen; Jenny Emnéus; Stephan S. Keller
Journal title: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
Journal number: annually
Journal publisher: IEEE
Published year: 2020
DOI identifier: 10.1109/mems46641.2020.9056270