Effect of molecular weight on the EUV-printability of main chain scission type polymers

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Authors: Ashish Rathore, Ivan Pollentier, Harpreet Singh, Roberto Fallica, Danilo De Simone, Stefan De Gendt

Journal title: Journal of Materials Chemistry C

Journal number: 8/17

Journal publisher: Royal Society of Chemistry

Published year: 2020

Published pages: 5958-5966

DOI identifier: 10.1039/c9tc06482f

ISSN: 2050-7534